Growth, Fabrication and Analysis of Amorphous Silicon Solar Cell
碩士 === 國立中央大學 === 物理研究所 === 95 === The main goal of the experiment is to grow hydrogenated amorphous silicon i-a-Si:H, p-a-Si:H and n-a-Si:H thin films of better single condition chosen to fabricate devices on glass by PECVD (plasma enhanced chemical vapor deposition) for analyzing electrical, optic...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01552130267633568445 |