Fabrication of a Single-Crystalline Silicon Thin Film on Quartz Using Hydrogen Ion Diffusion
碩士 === 國立中央大學 === 機械工程研究所 === 95 === Silicon on quartz (SOQ) wafer depending on its superior characteristics is an excellent candidate for fabricating future advanced electronic or electro-optical devices with high performance and low power consumption. Although previous reports have demonstrated se...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01908922441001228367 |