A study of fabrication micro convex spherical structure in amorphous resin through hot embossing
碩士 === 國立中央大學 === 機械工程研究所碩士在職專班 === 95 === The common MEMS processed technology often limits to deposits, lithography etching, laser processing, LIGA etc, So the production cost is expensive. This experiment uses the micro EDM technology, manufacture mold with radius 0.05mm depth 0.02mm micro concav...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86557870781566098652 |