Fabrication of Hydrogenated Amorphous Silicon Thin Films Using DC-pulse Magnetron Sputtering
碩士 === 國立中央大學 === 光電科學研究所 === 95 === In recent years, the researches of Thin Film Solar Cells attracted much attention for the reason of the energy crisis. To fabricate amorphous silicon thin film solar cells using plasma-enhance chemical vapor deposition (PECVD) is the most popular method. The disa...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39040429207208382754 |