Study of wavelength-modulated heterodyne grating interferometer
碩士 === 國立中央大學 === 光機電工程研究所 === 95 === A wavelength-modulated heterodyne grating interferometer is proposed to measure the displacement. A wavelength-modulated light is divided into s and p polarized parts, and these two polarized beams propagate with difference optical path. After combining these tw...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16087390118447155331 |