Study of wavelength-modulated heterodyne grating interferometer
碩士 === 國立中央大學 === 光機電工程研究所 === 95 === A wavelength-modulated heterodyne grating interferometer is proposed to measure the displacement. A wavelength-modulated light is divided into s and p polarized parts, and these two polarized beams propagate with difference optical path. After combining these tw...
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ndltd-TW-095NCU056510122015-10-13T13:59:55Z http://ndltd.ncl.edu.tw/handle/16087390118447155331 Study of wavelength-modulated heterodyne grating interferometer 波長調制外差式光柵干涉儀之研究 Kuei-yu Lee 李貴宇 碩士 國立中央大學 光機電工程研究所 95 A wavelength-modulated heterodyne grating interferometer is proposed to measure the displacement. A wavelength-modulated light is divided into s and p polarized parts, and these two polarized beams propagate with difference optical path. After combining these two polarized beams, we have the heterodyne light source. Then the heterodyne light is sent to the grating interferometer (GI). The optical phase variation which is induced by the grating movement will be measured by the heterodyne detection. By means of the measured optical phase variation and grating pitch, the displacement of the grating is determined. The experimental results demonstrate that the proposed system has measurement range up to 5 μm with 5 nm precision. The theoretical predication shows that the sensitivity is 1.728 °/nm and the maximum velocity measuring ability is 2.6 μm/s. The measurement errors, such as the environmental error, the geometric error and nonlinearity error, are also discussed 李朱育 2007 學位論文 ; thesis 83 zh-TW |
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碩士 === 國立中央大學 === 光機電工程研究所 === 95 === A wavelength-modulated heterodyne grating interferometer is proposed to measure the displacement. A wavelength-modulated light is divided into s and p polarized parts, and these two polarized beams propagate with difference optical path. After combining these two polarized beams, we have the heterodyne light source. Then the heterodyne light is sent to the grating interferometer (GI). The optical phase variation which is induced by the grating movement will be measured by the heterodyne detection. By means of the measured optical phase variation and grating pitch, the displacement of the grating is determined.
The experimental results demonstrate that the proposed system has measurement range up to 5 μm with 5 nm precision. The theoretical predication shows that the sensitivity is 1.728 °/nm and the maximum velocity measuring ability is 2.6 μm/s. The measurement errors, such as the environmental error, the geometric error and nonlinearity error, are also discussed
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李朱育
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李朱育
Kuei-yu Lee 李貴宇 |
author |
Kuei-yu Lee 李貴宇 |
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Kuei-yu Lee 李貴宇 Study of wavelength-modulated heterodyne grating interferometer |
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Kuei-yu Lee |
title |
Study of wavelength-modulated heterodyne grating interferometer |
title_short |
Study of wavelength-modulated heterodyne grating interferometer |
title_full |
Study of wavelength-modulated heterodyne grating interferometer |
title_fullStr |
Study of wavelength-modulated heterodyne grating interferometer |
title_full_unstemmed |
Study of wavelength-modulated heterodyne grating interferometer |
title_sort |
study of wavelength-modulated heterodyne grating interferometer |
publishDate |
2007 |
url |
http://ndltd.ncl.edu.tw/handle/16087390118447155331 |
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