以脈衝磁控濺鍍法製備鋯鈦酸鉛薄膜之參數探討
碩士 === 國立彰化師範大學 === 機電工程學系 === 95 === In this study we report on the influences of processes parameter for depositing PZT (Lead zirconate titanate) thin film on the silicon based Ti/Pt bottom electrode prepared by PMS(Pulse Magnetron Sputter) using single metallic target with a post deposition rapid...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99033275669243435988 |