摻雜Cr及V對AZO透明導電膜抗化性之研究
碩士 === 國立彰化師範大學 === 機電工程學系 === 95 === The purpose of this study is to investigate the effect of dopping different weight percent of chromium and vanadium in AZO films. That focuses on optical and electronic properties and chemical stability of doped AZO films. Sputtering parameters were adjusted by...
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Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/94764540367631798348 |