Selective 3D Submicron Glass Imprint Heads Fabrication by FIB for UV Cure
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 95 === Focused Ion Beam (FIB) has several advantages such as high sensitivity, high material removal rates, low forward scattering and directing fabrication. Without any etched mask, processing time can be reduced. Pyrex glass etched by FIB is used for fast fabrica...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/d4nehz |