Simulation of force output of piezo-micro-pump
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 95 === Among the MEMS field, the design and simulation of piezoelectric micro-actuators are difficult as compared to thermal micro-actuators and electrostatic micro-actuators. The main reason of the piezo-electric material coupling effect is difficult to calculate....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/jxw496 |