A Neural-Network Approach for Defect Recognition in TFT-LCD Photolithography Process
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 95 === Since the advent of high qualification and tiny technology, yield control in the photolithography process has played an important role in the manufacture of Thin Film Transistor-Liquid Crystal Displays (TFT-LCDs). Through an Auto Optic Inspection (AOI), defec...
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| Format: | Others |
| Language: | en_US |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87678118198259382214 |