Using Data Mining Technology to Analyze the Effective Variables of Yield Learning - A Case Study of a Semiconductor Manufacturing Process

碩士 === 國立清華大學 === 工業工程與工程管理學系 === 95 === In semiconductor manufacturing, yield learning is the most critical issue for process improvement. Speeding up the yield learning period can reduce the production cost and enhance the business profit. There are many papers which discussed the variables affec...

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Bibliographic Details
Main Authors: Ming - Chj Lu, 呂明澤
Other Authors: Chih - Ming Liu
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/29971731630948314645