Health Index of Semiconductor Processes & Equipments
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 95 === Semiconductor industry is one of the most important and capital-intensive industries in Taiwan. As the trend of extended wafer size and narrowed feature size of chips and dies, the powerful and suitable control scheme for such highly accurate manufacturing be...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46775226000866069102 |