Health Index of Semiconductor Processes & Equipments

• Main Authors: Chia-Jung Chang, 張佳蓉
• Other Authors: Wheyming Song
• Format: Others
• Language: en_US
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/46775226000866069102

碩士 === 國立清華大學 === 工業工程與工程管理學系 === 95 === Semiconductor industry is one of the most important and capital-intensive industries in Taiwan. As the trend of extended wafer size and narrowed feature size of chips and dies, the powerful and suitable control scheme for such highly accurate manufacturing becomes the essential issue to improve the yield, enhance the throughput and decrease the cost. Due to the rare output observation known as metrology compared with the huge sensor data set collected on-line over the whole process, it is the crucial challenge to detect the abnormal performance of process and analyze the health conditions of equipment effectively within the shortest possible time. In this research, the novel fault detection and classification, FDC, system is provided to perform the fast and precise diagnosis for process/equipment healthy performance determination.