Investigation of the formation of titanium silicide nanostructures on silicon
博士 === 國立清華大學 === 材料科學工程學系 === 95 === The growth mechanism and morphology of titanium silicide nanostructures on Si substrate have been investigated by scanning tunneling microscope (STM), atomic force microscope (AFM), transmission electron microscope (TEM), and in situ ultrahigh-vacuum TEM (UHV-TE...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57570972460941987055 |