Effects of Thin Film Properties on Metallic Pattern Formation by means of Direct Nanoimprint
碩士 === 國立清華大學 === 動力機械工程學系 === 95 === This thesis is focused on characterizing the mechanical properties of the thin film as function of grain size, defect and fabrication process, and investigating the effect of mechanical properties on formation of direct nanoimprint technique. Aluminum thin films...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58937731520171040802 |