Study of Nano-crystalline Zr(N,O) Thin Films on Si Substrate by Ion-Plating
碩士 === 國立清華大學 === 工程與系統科學系 === 95 === Zirconium nitride (ZrN) thin films have good corrosion and wear resistance in the aggressive environment for decorative coating. The narrow range of golden yellow color could limit the application of ZrN films in decorative coatings. By introducing the oxygen...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02005629931011688904 |