In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer
碩士 === 國立清華大學 === 工程與系統科學系 === 95 ===
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2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/49215270794215308198 |
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ndltd-TW-095NTHU55930762015-10-13T16:51:15Z http://ndltd.ncl.edu.tw/handle/49215270794215308198 In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer 利用相位調變式橢圓儀即時監測高介電係數常數材料之蝕刻過程 CHI-WEN HSIEH 謝啟文 碩士 國立清華大學 工程與系統科學系 95 林滄浪 柳克強 趙于飛 2007 學位論文 ; thesis 134 zh-TW |
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zh-TW |
format |
Others
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NDLTD |
description |
碩士 === 國立清華大學 === 工程與系統科學系 === 95 ===
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author2 |
林滄浪 |
author_facet |
林滄浪 CHI-WEN HSIEH 謝啟文 |
author |
CHI-WEN HSIEH 謝啟文 |
spellingShingle |
CHI-WEN HSIEH 謝啟文 In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer |
author_sort |
CHI-WEN HSIEH |
title |
In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer |
title_short |
In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer |
title_full |
In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer |
title_fullStr |
In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer |
title_full_unstemmed |
In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer |
title_sort |
in-situ monitoring the etching process of high-k material by modulation ellipsometer |
publishDate |
2007 |
url |
http://ndltd.ncl.edu.tw/handle/49215270794215308198 |
work_keys_str_mv |
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