In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer

In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer

碩士 === 國立清華大學 === 工程與系統科學系 === 95 ===

Bibliographic Details
Main Authors: CHI-WEN HSIEH, 謝啟文
Other Authors: 林滄浪
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/49215270794215308198
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spelling ndltd-TW-095NTHU55930762015-10-13T16:51:15Z http://ndltd.ncl.edu.tw/handle/49215270794215308198 In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer 利用相位調變式橢圓儀即時監測高介電係數常數材料之蝕刻過程 CHI-WEN HSIEH 謝啟文 碩士 國立清華大學 工程與系統科學系 95 林滄浪 柳克強 趙于飛 2007 學位論文 ; thesis 134 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 工程與系統科學系 === 95 ===
author2 林滄浪
author_facet 林滄浪
CHI-WEN HSIEH
謝啟文
author CHI-WEN HSIEH
謝啟文
spellingShingle CHI-WEN HSIEH
謝啟文
In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer
author_sort CHI-WEN HSIEH
title In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer
title_short In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer
title_full In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer
title_fullStr In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer
title_full_unstemmed In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer
title_sort in-situ monitoring the etching process of high-k material by modulation ellipsometer
publishDate 2007
url http://ndltd.ncl.edu.tw/handle/49215270794215308198
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