In-situ Monitoring the Etching Process of High-K Material by Modulation Ellipsometer
碩士 === 國立清華大學 === 工程與系統科學系 === 95 ===
Main Authors: | CHI-WEN HSIEH, 謝啟文 |
---|---|
Other Authors: | 林滄浪 |
Format: | Others |
Language: | zh-TW |
Published: |
2007
|
Online Access: | http://ndltd.ncl.edu.tw/handle/49215270794215308198 |
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