Measurement and discussion of dielectric thin film thermal conductivity
碩士 === 國立清華大學 === 微機電工程研究所 === 95 === Heat transport in 30–300 nm thick dielectric films is characterized in the temperature range of 74–300 K using the 3ω method, which is a simple method to measure the cross-plane thermal conductivity of dielectric thin films. Dielectric film samples of two kinds,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73481943562454649947 |