X-Ray Lithography-based 3D Micro Fabrication and the Study of Swelling Effect of PMMA
碩士 === 國立清華大學 === 微機電工程研究所 === 95 === X-ray lithography was good at fabricating high resolution and high aspect ratio microstructures. But this process could only fabricate microstructures with vertical wall which has largely limited the versatility in the applications of LIGA process. In order to a...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78657329177649235092 |