Deposited PZT film for microactuators using a hydrothermal method
碩士 === 國立臺灣師範大學 === 機電科技研究所 === 95 === Traditional deposition of ceramic piezoelectric lead zirconate titanate (PZT) thin film was used RF magnetron sputtering method, or sol-gel method spin-coating before sintered at high temperature (650 C 700 C), it has some shortcomings, those are: process e...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34274746494188098990 |