Fabrication and Characterization of RuO2-Al2O3 Thin Film Microbolometer
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 95 === Abstract Since the RuO2-Al2O3 film has higher temperature coefficient of resistivity, it is thus an important bolometer material applied in the non-cooling type radiation sensor. In this experiment, RF magnetron sputtering system is used to grow RuO2-Al2O3 thin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93368075013076313365 |