A Study of ZnO Short-Wavelength Electroluminescence Devices
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 95 === In this study, RF (radio frequency) magnetron sputtering method is used to deposit ZnO thin film on SiO2/Si substrate. Meanwhile, thin films that are treated with different temperatures and different annealing time are performed with characteristics measurement...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75590164646680756678 |