Control of spike annealing in a RTP-thermal budget based approach
碩士 === 臺灣大學 === 化學工程學研究所 === 95 === Continuing downsizing of the integrated circuit (IC) critical dimension (CD) leads to stringent requirement in temperature control of rapid thermal processor (RTP). In particular, for rapid thermal annealing, the spike annealing becomes the standard practice inste...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94676488865624778883 |