Linearization of a Two-Axis MEMS ScannerDriven by Vertical Comb-Drive Actuators
碩士 === 臺灣大學 === 光電工程學研究所 === 95 === MEMS (Micro-Electro-Mechanical Systems) scanners have been widely adopted in telecommunications, projection displays, and biomedical images. If we want to linearize the scanning field of a MEMS scanner, which is distorted by the intrinsic nonlinearity of the elect...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/24721005979699725034 |