The Optical Properties of Zinc Oxide Grown by Atomic Layer Deposition
碩士 === 臺灣大學 === 材料科學與工程學研究所 === 95 === Abstract This thesis studied the optical properties of the ZnO deposited by atomic layer deposition (ALD) on different substrates. It can be divided into three topics. The first topic is the epitaxial growth of ZnO on the SiC substrate. The columnar growth mod...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65875863434501759648 |