Hole Transport Characteristic Of Wrinkling SiGe Thin Film

碩士 === 國立臺灣大學 === 電子工程學研究所 === 95 === Until today, gate length of MOSFET have scaled down to nano-scale. As semiconductor process keep regenerating, ITRS predict that the channel length will smaller than sixteen nano. Process technologic followed technic of nowadays will not keep scaling down. In or...

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Bibliographic Details
Main Authors: Wei-Yu Ma, 馬威宇
Other Authors: Hung-Hsiang Cheng
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/27057599880066752124