The Mechanisms of Electric-Field-Directed Growth of Silicon Nanowires
碩士 === 國立臺灣大學 === 電子工程學研究所 === 95 === Electric-field-directed growth and self-assembly of undoped silicon nanowires by chemical-vapor deposition via the vapor-liquid-solid (VLS) growth mechanism in a low pressure chemical vapor deposition (LPCVD) system is demonstrated. The nanowires are seen to res...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41999244328634131548 |