The Development of a Precision Abbé-free Three-axis Moving Stage
碩士 === 國立臺灣大學 === 機械工程學研究所 === 95 === Positioning technique is the basic requirement in manufacturing, measuring, and operating machines. Recently, the need of fabrication precision has progressed from micrometer to nanometer. However, it’s rather difficult for traditional industry to achieve the re...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/12965749540919251996 |