Study for Fabricating an Anisotropic Silicon Ring Vibrating Gyroscope
碩士 === 國立臺灣大學 === 應用力學研究所 === 95 === This thesis presents the fabrication of a 150um tall (100) single-crystal silicon ring gyroscope with high aspect-ratio fabricated by MEMS technology. A new design of vibrating ring will be introduced to ensure the resonance frequency of both and molds being t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14290612288551138420 |