High Frequency Film Bulk Acoustic Wave Filter Using AlN as the Piezoelectric Layer
碩士 === 臺灣大學 === 應用力學研究所 === 95 === Due to the great demands posed by mobile communication systems and sensor network systems, smaller, cheaper, and more efficient devices are required. However, passive elements, such as inductors, usually suffer from great loss in silicon substrate. A thin film bulk...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58579192955851149302 |