Selective Growth of RuO2 Nanorods Using Reactive Sputtering
碩士 === 國立臺灣科技大學 === 化學工程系 === 95 === The technique of area-selective growth of RuO2 nanorods via reactive sputtering is explored in this master thesis. The substrates are sapphire (100) and (012), denoted as SA(100) and SA(012), patterned with SiO2 using a copper grid mask. The RuO2 nanorods are ver...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qdf7ra |