Development of a Pneumatic-Piezoelectric Hybrid Servo XY-Z Positioning System with Large Stroke and High Precision using Adaptive Sliding Control
碩士 === 國立臺灣科技大學 === 自動化及控制研究所 === 95 === The objective of this thesis is to develop a pneumatic-piezoelectric hybrid servo XY-Z three-axial positioning system with large stroke and high precision. In the single axis the pneumatic servo system serves to position in coarse stroke and the piezoelectric...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5mxgqw |