Development of a Pneumatic-Piezoelectric Hybrid Servo XY-Z Positioning System with Large Stroke and High Precision using Adaptive Sliding Control

• Main Authors: Yuan-Ming Liu, 劉淵銘
• Other Authors: Mao-Hsiung Chiang
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/5mxgqw

碩士 === 國立臺灣科技大學 === 自動化及控制研究所 === 95 === The objective of this thesis is to develop a pneumatic-piezoelectric hybrid servo XY-Z three-axial positioning system with large stroke and high precision. In the single axis the pneumatic servo system serves to position in coarse stroke and the piezoelectric(PZT) actuator compensates fine stroke. This multi-axis system is constituted with the combined X- and Y-axis and the separated Z-axis. The function approximation technique(FAT) based adaptive sliding controller(ASC) is used to control this servo system. This control strategy can solve the time-varying uncertainties which bounds is unknown by the FAT. Besides, in order to reduce the overshoot in the process of positioning control, the trajectory position control, which combines position control for steady state with trajectory control of transient state, is developed in this study. The simulation and experiment are both implemented using the FAT-ASC, including single- and three-axial trajectory control of the pneumatic servo system, single- and three-axial trajectory control of the piezoelectric servo system as well as the large stroke and nanometer accuracy trajectory-position control of the novel pneumatic-piezoelectric hybrid servo system. The simulation and experiment results show that the system can achieve high positioning accuracy and excellent tracking performance.