Development of a Pneumatic-Piezoelectric Hybrid Servo XY-Z Positioning System with Large Stroke and High Precision using Adaptive Sliding Control
碩士 === 國立臺灣科技大學 === 自動化及控制研究所 === 95 === The objective of this thesis is to develop a pneumatic-piezoelectric hybrid servo XY-Z three-axial positioning system with large stroke and high precision. In the single axis the pneumatic servo system serves to position in coarse stroke and the piezoelectric...
Main Authors: | Yuan-Ming Liu, 劉淵銘 |
---|---|
Other Authors: | Mao-Hsiung Chiang |
Format: | Others |
Language: | zh-TW |
Published: |
2007
|
Online Access: | http://ndltd.ncl.edu.tw/handle/5mxgqw |
Similar Items
-
Development of a Novel Intelligent Pneumatic-Piezoelectric Hybrid Servo Positioning XY Platform with Large Stroke and Nanometer Precision
by: Chen Chun Yu, et al.
Published: (2004) -
Development of an Novel Intelligent Pneumatic-Piezoelectric Hybrid Servo Positioning X-Y Platform with Large Stroke and Submicrometer Precision
by: Kuo Tsang Min, et al.
Published: (2003) -
Development of a Novel Intelligent Pneumatic-Piezoelectric Hybrid Servo XYZ Positioning System with Large Stroke and Nanometer Precision
by: Wen-hsien Yang, et al.
Published: (2006) -
Modified Signed-Distance Fuzzy Sliding Mode Control for Simulation and Control of a Pneumatic-Piezoelectric Hybrid Servo Positioning Platform with Large Stroke and Sub-micrometer Precision
by: Li Ming-Long, et al.
Published: (2004) -
Development of Intelligent Pneumatic-Piezoelectric Hybrid Positioning Control System with Large stroke and Submicrometer Precision
by: Ying-Shu Chang, et al.
Published: (2002)