Dynamical Analysis and Control of a Non-contact Atomic Force Microscopy Probe System

碩士 === 國立臺灣科技大學 === 高分子系 === 95 === The objective of this thesis is to discuss the dynamic analysis and controlling system design for atomic force microscopy, with the aim to enhance the system stability and achieve accuracy and precision in positioning. First, the kinetic and potential energy of sy...

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Bibliographic Details
Main Authors: Jeng-Yi Tzeng, 曾正一
Other Authors: Chung-feng Kuo
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/82w587