CO2 laser annealing of PZT thick films on different substrates
碩士 === 國立臺灣科技大學 === 機械工程系 === 95 === In this study, lead zirconate titanate (PZT) ferroelectric thick films are prepared by a modified sol-gel method. The microstructure of the thick film is transformed from the amorphous phase to the perovskite structure by using CO2 laser low temperature annealing...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7qg4c8 |