Optimization Design for Cross-Coupling Controller of the Coplanar Nano-Stage
碩士 === 國立虎尾科技大學 === 電機工程研究所 === 95 === The purpose of the proposed approach is to design a tracking controller for a piezoelectric actuated five degree-of-freedom coplanar nanostage which can provide high-precision applications. The nanostage allows displacements parallel to the sample surface (x-y...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7rh2z6 |