Design and Control of a Long-Stroke-Nano-Positioning Stage.
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 95 === A dual-axis long-stroke-nano-positioning stage was developed in this project. A traditional ball screw and linear guided way, provided by the PMI Co. Taiwan, was employed with a 3-DOF piezo-stage, 3-DOF measurement system and a PID closed-loop countroller fo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9t8x95 |