Design and Control of a Long-Stroke-Nano-Positioning Stage.
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 95 === A dual-axis long-stroke-nano-positioning stage was developed in this project. A traditional ball screw and linear guided way, provided by the PMI Co. Taiwan, was employed with a 3-DOF piezo-stage, 3-DOF measurement system and a PID closed-loop countroller fo...
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9t8x95 |
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ndltd-TW-095NYPI54900522019-09-22T03:40:57Z http://ndltd.ncl.edu.tw/handle/9t8x95 Design and Control of a Long-Stroke-Nano-Positioning Stage. 長行程奈米級精密平台研製 Yi-Tsung Li 李羿宗 碩士 國立虎尾科技大學 機械與機電工程研究所 95 A dual-axis long-stroke-nano-positioning stage was developed in this project. A traditional ball screw and linear guided way, provided by the PMI Co. Taiwan, was employed with a 3-DOF piezo-stage, 3-DOF measurement system and a PID closed-loop countroller for this stage. The working range of the stage can be up to 300 mm × 300mm with a resolution of 10 nm in each linear axis and 1 arcsec in the rotary axis. Wen-Yuh Jywe 覺文郁 2007 學位論文 ; thesis 84 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
| description |
碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 95 === A dual-axis long-stroke-nano-positioning stage was developed in this project. A traditional ball screw and linear guided way, provided by the PMI Co. Taiwan, was employed with a 3-DOF piezo-stage, 3-DOF measurement system and a PID closed-loop countroller for this stage. The working range of the stage can be up to 300 mm × 300mm with a resolution of 10 nm in each linear axis and 1 arcsec in the rotary axis.
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| author2 |
Wen-Yuh Jywe |
| author_facet |
Wen-Yuh Jywe Yi-Tsung Li 李羿宗 |
| author |
Yi-Tsung Li 李羿宗 |
| spellingShingle |
Yi-Tsung Li 李羿宗 Design and Control of a Long-Stroke-Nano-Positioning Stage. |
| author_sort |
Yi-Tsung Li |
| title |
Design and Control of a Long-Stroke-Nano-Positioning Stage. |
| title_short |
Design and Control of a Long-Stroke-Nano-Positioning Stage. |
| title_full |
Design and Control of a Long-Stroke-Nano-Positioning Stage. |
| title_fullStr |
Design and Control of a Long-Stroke-Nano-Positioning Stage. |
| title_full_unstemmed |
Design and Control of a Long-Stroke-Nano-Positioning Stage. |
| title_sort |
design and control of a long-stroke-nano-positioning stage. |
| publishDate |
2007 |
| url |
http://ndltd.ncl.edu.tw/handle/9t8x95 |
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