Synthesis and characterization of Titanium carbide by Filter Cathodic Arc Plasma
碩士 === 中國文化大學 === 材料科學與奈米科技研究所 === 95 === In this study, we use the Filter Cathodic Vacuum Arc Deposition System. Due to have Filter System, it can be improved to filter macro-particle. At surface roughness, plates the film adhering and has great improvement with the hole rate on the surface, and pl...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46960769912778923515 |