A Study of Gradual Change EWMA Controller for Drifted Processes
碩士 === 南台科技大學 === 工業管理研究所 === 95 === In the semiconductor manufacturing, process shift or drift often exists. The double exponentially weighted moving average (d-EWMA) controller has shown to be able to compensate for such processes much more effectively than the single EWMA (s-EWMA) controller. Th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88051263755884172692 |