Field Emission Characteristics of Surface treated Carbon Nanotubes Grown by ECR-CVD
碩士 === 南台科技大學 === 光電工程系 === 95 === In this study, the carbon nanotubes (CNTs) have been grown on Si and SiO2 substrates using electron cyclotron resonance chemical vapor deposition (ECR-CVD) at low temperature 500℃. ECR grown CNTs are accompanied with the growth of carbon nanoclusters, which appear...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/45852756697090991013 |