Dynamic Programmable Logic Arrays Considering Optical Proximity Effect
碩士 === 南台科技大學 === 電子工程系 === 95 === Since the critical dimension (CD) in the nano-scaled fabrication is way smaller than the wavelength, diffraction might create serious problem such as optical proximity effect (OPE) and cause distortion of the masked prints. Furthermore, other types of distortion m...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24339169885750027769 |