Design Flow Integration for Integrated Circuit Backend Design and Photolithography Simulation

碩士 === 南台科技大學 === 電子工程系 === 95 === With the rapid development of semiconductor industry and the complicated of circuit design of the IC (Integrated Circuit), the size of the cell on a chip has become narrower to nanometer width. And the IC manufacture is toward to the goal of higher density, narrowe...

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Bibliographic Details
Main Authors: Ping-Tsung Jeng, 鄭評聰
Other Authors: Jing-Jou Tang
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/80283147505411849811