Design Flow Integration for Integrated Circuit Backend Design and Photolithography Simulation
碩士 === 南台科技大學 === 電子工程系 === 95 === With the rapid development of semiconductor industry and the complicated of circuit design of the IC (Integrated Circuit), the size of the cell on a chip has become narrower to nanometer width. And the IC manufacture is toward to the goal of higher density, narrowe...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/80283147505411849811 |