Development of a large measurement range ultra precision with topography machine
碩士 === 南台科技大學 === 機械工程系 === 95 === The purpose of this study is to develop a large measurement range ultra precision with topography with advantages of low cost and high precision. The measurement system is consisted of Piezo Ceramic Linear Moter (PCLM), X/Y axis microstep motor, and contact probe w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44836967883117797787 |