Feasibility Study of Particle Removal from Silicon Wafer Surface by Dilute APM and Hydrogenated UPW
碩士 === 東海大學 === 環境科學與工程學系 === 95 === Semiconductor manufacturing represents an important economic source for the industrial sector in Taiwan. However, the intensive water consumption and the large number of chemical processes, especially in the wafer cleaning procedure, have also caused concerns of...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57557559905513845530 |