Investigation of the microstructure and characterizations of TiN/CrN nano- multilayer deposited by unbalanced magnetron sputter process
碩士 === 國立臺北科技大學 === 製造科技研究所 === 95 === In this study, TiN/CrN nano-scale multilayers with bilayer period Λ were deposited on a WC substrate by DC magnetron sputter process. Also the microstructure, mechanical properties, thermal stability and oxidation resistance of the films were characterized. Two...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/c7vrsu |