A Study of Carbon nanotube Field effect Transistor Gas Sensor compatible with CMOS
碩士 === 國立臺北科技大學 === 機電整合研究所 === 95 === In this thesis, we developed a CNTFETs device compatible with the TSMC CMOS process. The production temperature of the carbon nanotube is higher than the limitation of the CMOS . For example, the limitation of the CMOS chip made by for TSMC 0.35μm 2P4M is 380℃....
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/c48y9y |